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Role of deposition pressure on properties of phosphorus doped hydrogenated nano-crystalline silicon (nc-Si:H) thin films prepared by Cat-CVD method

Author(s):

Bharat Gabhale, Ashish Waghmare, Subhash Pandharkar, Ajinkya Bhorde, Shruthi Nair, Priti Vairale, Vidya Doiphode, Pratibha Shinde, Ashvini Punde, Yogesh Hase, Nilesh Patil, Mohit Prasad and Sandesh Jadkar*   Pages 1 - 12 ( 12 )

Abstract:


Phosphorus doped hydrogenated nano-crystalline silicon (nc-Si:H) thin films were synthesized by catalytic chemical vapor deposition (Cat-CVD) method. The effect of deposition pressure on opto-electronic and structural properties was studied using various analysis techniques such as low angle XRD analysis, FTIR spectroscopy, Raman spectroscopy, UV-Visible spectroscopy and dark conductivity etc. From low angle XRD and Raman spectroscopy analysis it is observed that increase in deposition pressure causes Si:H films to transform and transit from amorphous to crystalline phase. At optimized deposition pressure (300 mTorr), phosphorous doped nc-Si:H films having crystallite size of  29 nm and crystalline volume fraction of  58 % along with high deposition rate ( 29.7 Å/s) have been obtained. The band gap was found to be  1.98 eV and hydrogen content was as low as ( 1.72 at. %) for these films. The deposited films can be useful as n-type layer for Si:H based p-i-n, tandem and c-Si hetero-junction solar cells

Keywords:

Cat-CVD, Phosphorus doped nc-SI:H, Electrical properties, XRD, Raman Spectroscopy

Affiliation:

School of Energy Studies, Savitribai Phule Pune University, Pune 411 007, School of Energy Studies, Savitribai Phule Pune University, Pune 411 007, School of Energy Studies, Savitribai Phule Pune University, Pune 411 007, School of Energy Studies, Savitribai Phule Pune University, Pune 411 007, School of Energy Studies, Savitribai Phule Pune University, Pune 411 007, School of Energy Studies, Savitribai Phule Pune University, Pune 411 007, School of Energy Studies, Savitribai Phule Pune University, Pune 411 007, School of Energy Studies, Savitribai Phule Pune University, Pune 411 007, School of Energy Studies, Savitribai Phule Pune University, Pune 411 007, School of Energy Studies, Savitribai Phule Pune University, Pune 411 007, School of Energy Studies, Savitribai Phule Pune University, Pune 411 007, School of Energy Studies, Savitribai Phule Pune University, Pune 411 007, School of Energy Studies, Savitribai Phule Pune University, Pune 411 007



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